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Advantages

A Range of MicroE Products

The MicroE Systems Advantage

MicroE Systems encoders are renowned for their small size, ease of setup, and features. But more customers are also discovering their world-class performance.

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Vacuum Encoders

High Vacuum Encoders: Overview

Vacuum EncodersHigh Performance at High Vacuum with the Smallest Encoders: Mercury™ and Mercury II™.

Mercury™ and Mercury II™ vacuum encoders are specified in a wide range of applications due to their combination of performance, small size, and high vacuum rating. Choose from models with programmable digital output, analog output, or digital output right from the sensor, all constructed using vacuum-compatible materials rated up to 10-8 torr. All sensors can be used with linear, rotary and arc segment scales.
 
Model Resolution Output Features Scales
Mercury II 6000V 5μm–1.2nm Digital Programmable Glass; Linear & Rotary
Mercury 3500V 5μm–5nm Digital Programmable Glass; Linear & Rotary
Mercury 2000V 5μm–78nm Digital Programmable Glass; Linear & Rotary
Mercury 1000V 5μm–78nm Analog 1Vpp Output Glass; Linear & Rotary
Mercury 1500V 5μm–0.5μm Digital Digital from the Sensor Glass; Linear & Rotary
Accuracy Long Travel
With Glass Scales (Linear) High accuracy grade: up to ±1μm†
Standard accuracy grade: ±3μm†
† See data sheets for full specifications

Specifications and Downloads

 

High Performance in the Smallest Package 

Miniature Vacuum EncoderWith sensors only 8.2mm tall, capable of resolutions up to 1.2nm and cyclical error of ±20nm, unsurpassed motion system performance is achieved in the most compact vacuum applications. Plus, thermal effects are minimized due to the low power consumption of Mercury encoder sensors — only 0.25W for most models. All models perform at 10-8 torr with negligible outgassing. Bake out is rated at 150°C for 48 hours. And Mercury and Mercury II vacuum encoders perform in high magnetic field environments.

Unsurpassed Ease of Use 

Encoder showing alignment tolerance of +/- 2 degrees
• Broadest Alignment Tolerances: With the broadest alignment tolerances in the industry, a full ±2 degrees, Mercury and ChipEncoder are the easiest and the fastest sensor to align and setup. You can align the Mercury sensor in under 30 seconds.
• SmartPrecision Software: Optional software for setup, data plots, diagnostics, and programmable features (programmable models).

 

Wide Range of Scales

Linear and Rotary Glass ScalesVacuum-compatible linear and rotary glass scales are available in lengths from 13mm to 2m, and diameters up to 121mm. Rotary glass scales are available with or without hubs, and in arc segments.
• Linear measuring length as small as 13mm
• Accuracy up to ±1μm
• Compact: Only 6mm wide, including the built-in index (applications ≤130mm)
• Rotary diameter as small as 12mm
• Custom options: Special widths, thicknesses, near-zero CTE materials, diameters, or rotary arc segments