The new Mercury™ 1500V digital output encoder is the smallest high-performance digital output encoder available for vacuum applications. Rated to1E-8 torr, the sensor is vented, constructed with vacuum compatible materials and rated for 48 hour bake out at 150°C.

The Mercury 1500V produces A-Quad-B and index window digital outputs directly from the sensor. All electronics are housed within a casing that measures just 8.4mm tall. This low Z-Height sensor makes the M1500V kit encoder ideal for motion platform designs used in semiconductor processing equipment. Electron microscopy, and other demanding vacuum-rated applications also benefit from the Mercury 1500V's small size and high-performance.

The small size and affordable price of the Mercury 1500V will reduce the cost and size of your motion platform, while significantly improving its performance. Available resolutions range from 5µm to 0.50µm linear, or 6,600 CPR to 655,000 CPR rotary. Simply specify the factory-set interpolation level of x4, x8, x20, or x40 when placing your order. The Mercury 1500V can be an important part of your strategy for designing equipment with the smallest foot print and highest performance.

Ease of use and installation are design objectives that the M1500V shares with the rest of the Mercury encoder family. All Mercury encoder sensors work with both linear and rotary glass scales, making it easy for OEMs to reduce manufacturing and field support inventory costs.

Broad alignment tolerances make Mercury encoder sensors the easiest to align in the industry. With an alignment tolerance of ± 2 degrees, the sensor can be aligned in 30 seconds or less. No other encoder is so user friendly.

Finally, the Mercury 1500V encoder is very robust. The entire system is EMI shielded against electrical noise for use in the toughest environments, and that will enhance overall system reliability, repeatability and accuracy.

Mercury™ 1500V Specifications

• Small sensor with ultra-low Z height; flush screw mounting
  
  
• Sensor: 8.4mm (H) x 12.7mm (W) x 20.6mm (L),weight:1.6g
  
  
• A-quad-B output and bi-directional index signal from the sensor head
  
  
• Factory set interpolation: x4, x8, x20, x40 for resolution from 5µm to 0.50µm (linear); 6,600 CPR to 655,000 CPR (rotary)
  
  
• System is supplied with flying leads, ready for customer termination at the vacuum wall
  
  
• Bi-directional index signal
  
  
• Index mark at the center or end of the glass scale (linear)
  
  
• Vacuum rated to 1E-8 torr

The Mercury Encoder Family
Over 25 Models for Design Flexibility

Programmable Encoder Systems
Mercury™ programmable encoders feature programmable resolution in integer steps, programmable output frequency, and programmable alarms. LED indicators enable 30 second alignment. 5 models are available with resolutions ranging from 5µm to 5nm, linear, or 6,600 CPR to 67.1M CPR, rotary. A-quad-B output is standard; available high-speed serial word output enables 7.2m/s speed at 5nm resolution. The sensor measures just 8.4mm tall and the entire system is shielded for harsh environments. Optional SmartPrecision™ software assures fast setup, flexible diagnostics and a variety of graphical data plots.

Digital-Output-From-The-Sensor Encoder Systems
The Mercury™ series digital encoders feature
A-quad-B output and are the smallest high-performance devices in their class. Two models are available: The new M1800 is available with factory-set interpolation: x200 or x400 for resolution of 100 or 50 nanometers, linear or up to 65.5M CPR, rotary. The M1500 is available with factory-set interpolation: x4, x8, x20, or x40 for resolutions of 5microns to 0.50microns, linear, or 6,600 CPR to 655,000 CPR, rotary. Two connector styles are available for both Models; a standard D-sub or a micro connector for tight spaces. Both have double shielded cables.

Seven Vacuum-rated Models
The M1500V features the same performance as its atmospheric counterpart, but is rated to1E-8 torr and is available with flying leads for customer termination. Alignment and setup are accomplished in under 30 seconds with the SmartPrecision™ Alignment Tool and optional SmartPrecision™ software. Additional vacuum-rated models include the M3500VSi, M3500V, M3000VSi, M3000V, M2000V and M1000V which include programmable A-quad-B output, serial-output and analog output models. Resolutions range from 5µm to 5nm linear, and 6,600 to 67.1M CPR rotary.

Analog Output Encoder Systems
Mercury™ 1000 and 1200 analog output encoders are ideal for use with your electronics. Both models have analog sine/cosine output. The M1200 is a 5.6mm tall, unshielded PC-board mount unit. The M1000 is 8.4mm tall and a is a shielded unit terminated in a standard 15-pin
D-sub connector. It features auto calibration to optimize accuracy and is rapidly installed with the SmartPrecision™ Alignment Tool and optional SmartPrecision™ software.

SmartPrecision ™ Encoder Setup Software for Mercury Encoders
SmartPrecision software makes Mercury™ encoders the easiest family of encoders to use. It lets you program resolution and bandwidth, monitor operation, set alarms, and diagnose Mercury encoders with the click of a mouse. Data plots include Lissajous display of raw and corrected encoder signal, signal strength over the length of the scale, encoder position over time and velocity over time. SmartPrecision software is compatible with Windows 95, 98, ME, NT, 2000, and XP.